Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
Semiconductor Devices: Physics and Technology
Author:
Simon M. Sze,Ming-Kwei Lee
By:
Wiley
ISBN10:
0470537949
ISBN13:
9780470537947
